Introduction The development of capacitive micromachined ultrasonic transducers (CMUTs) has significantly advanced the field of...

Introduction The micro-electro-mechanical systems (MEMS) industry is experiencing significant growth and transformation, driven by...

Introduction The integration of piezoelectric MEMS with CMOS technology represents a significant advancement in microsystems engineering....

Introduction Flow sensing technology has wide applications in industrial monitoring, medical diagnostics, and other fields. With the...